S.MADHAVA REDDY; J PAVAN KUMAR; K.SUDHAKAR REDDY. An Overview Of Micro Electro Mechanical Systems And Challenges Of MEMS. Journal of Science & Technology (JST), [S. l.], v. 3, n. 3, p. 50–57, 2018. Disponível em: https://jst.org.in/index.php/pub/article/view/235. Acesso em: 17 jul. 2024.