S.Madhava Reddy, J Pavan kumar, K.Sudhakar Reddy. An Overview Of Micro Electro Mechanical Systems And Challenges Of MEMS. J. sci. technol. [Internet]. 2018 May 25 [cited 2025 Aug. 16];3(3):50-7. Available from: https://jst.org.in/index.php/pub/article/view/235