S.Madhava Reddy, J Pavan kumar, K.Sudhakar Reddy. An Overview Of Micro Electro Mechanical Systems And Challenges Of MEMS. Journal of Science & Technology (JST) [Internet]. 2018 May 25 [cited 2024 Jul. 17];3(3):50-7. Available from: https://jst.org.in/index.php/pub/article/view/235