An Overview Of Micro Electro Mechanical Systems And Challenges Of MEMS

Abstract

Micro-Electro-Mechanical Systems, or MEMS, is a technology that in its most general form can be defined as miniaturized mechanical and electro-mechanical elements that are made using the techniques of micro fabrication. The critical physical dimensions of MEMS devices can vary from well below one micron on the lower end of the dimensional spectrum, all the way to several millimeters. Likewise, the types of MEMS devices can vary from relatively simple structures having no moving elements, to extremely complex electromechanical systems with multiple moving elements under the control of integrated microelectronics. The one main criterion of MEMS is that there are at least some elements having some sort of mechanical functionality whether or not these elements can move. The term used to define MEMS varies in different parts of the world. In the United States they are predominantly called MEMS, while in some other parts of the world they are called “Microsystems Technology” or “micro machined devices”. This report deals with the field of micro-electromechanical systems or MEMS. MEMS encompass the process-based technologies used to fabricate tiny integrated devices and systems that integrate functionalities from different physical domains into one device. Such devices are fabricated using a wide range of technologies having in common the ability to create structures with micro-scale and even nano scale accuracies. The products range in size from a few microns to millimeters. These devices have the ability to sense, control and actuate on the micro scale and generate effects on the macro scale. Keywords - Micro electromechanical System, miniaturization, actuators, sensors